منابع مشابه
Cantilever beam electrostatic MEMS actuators beyond pull-in
The operational range of electrostatic MEMS parallel plate actuators can be extended beyond pull-in in the presence of an intermediate dielectric layer, which has a significant effect on the behavior of such actuators. Here, we study the behavior of cantilever beam electrostatic actuators beyond pull-in using a beam model along with a dielectric layer. The results from the simple beam model are...
متن کاملMems Parallel Plate Actuators: Pull-in, Pull-out and Other Transitions
The operational range of MEMS electrostatic parallel plate actuators can be extended beyond pull-in with the presence of an intermediate dielectric layer, which has a significant effect on the behavior of such actuators. Here we study the behavior of cantilever beam electrostatic actuators beyond pull-in, using a beam model. Three possible static configurations of the beam are identified over t...
متن کاملAccurate Determination of the Pull-in Voltage for MEMS Capacitive Microphone with Clamped Square Diaphragm
Accurate determination of the pull-in, or the collapse voltage is critical in the design process. In this paper an analytical method is presented that provides a more accurate determination of the pull-in voltage for MEMS capacitive devices with clamped square diaphragm. The method incorporates both the linearized modle of the electrostatic force and the nonlinear deflection model of a clamped ...
متن کاملA Wireless MEMS-Based Inclinometer Sensor Node for Structural Health Monitoring
This paper proposes a wireless inclinometer sensor node for structural health monitoring (SHM) that can be applied to civil engineering and building structures subjected to various loadings. The inclinometer used in this study employs a method for calculating the tilt based on the difference between the static acceleration and the acceleration due to gravity, using a micro-electro-mechanical sy...
متن کاملEstimates on Pull-in Distances in MEMS Models and other Nonlinear Eigenvalue Problems
Motivated by certain mathematical models for Micro-Electro-Mechanical Systems (MEMS), we give upper and lower L∞ estimates for the minimal solutions of nonlinear eigenvalue problems of the form −∆u = λf(x)F (u) on a smooth bounded domain Ω in RN . We are mainly interested in the pull-in distance, that is the L∞−norm of the extremal solution u∗ and how it depends on the geometry of the domain, t...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Procedia Engineering
سال: 2012
ISSN: 1877-7058
DOI: 10.1016/j.proeng.2012.09.377